Xensor offers custom development of MEMS sensors and actuators.
An important strength is that we can develop, but also produce the MEMS element that was developed. So, you are not stuck with a nice MEMS element from a successful development that subsequently cannot be manufactured.
In general we approach a development stepwise, with iterations where necessary, and go-no go decisions at every step:

  • feasibility study
  • design
  • prototyping
  • production

The confidentiality of your project (and even of your association with us) is guaranteed. Below we give some examples of projects carried out by Xensor for customers, some of the products (or their successors) are in production for decades already. 

We may already have a standard sensor to suit your application: Product Overview

Flash DSC1
O2 sensor
Micro-injector for GC

Xensor, in cooperation with Anatech and SciTe (from the south of the Netherlands), and Mettler-Toledo from Switzerland have developed a standard laboratory instrument for chip calorimetry, the Flash DSC1.
This fast DSC method can measure at scan rates up to 40 000 K/s.

Flash DSC 1



DrägerWerk in Lübeck, Germany and  Xensor have developed the sensing heart of a revolutionary oxygen sensor.
The measurement is based on determination of the thermal conductivity of the gas surrounding the silicon chip, which yields a measure for the concentration of oxygen.

O2 sensor

Xensor, in cooperation with Agilent, used micro-machined silicon 'channels' and synthetic micro-valves to create a micro-injector for portable micro gas chromatographs (GC).
It analyzes small amounts of gas with a high degree of accuracy.
And, important for portable applications, it is much smaller, faster and lighter than the standard stainless-steel injectors.

Micro-injector for portable gas chromatograph