The XEN-393 and XEN-394 series of micro-machined thin-film calorimeter sensors are designed for measurements on small samples with high temperature scanning rates. The XEN-393 series are made with aluminium interconnections, limiting them to a lower temperature range than the XEN-394 series, which has gold interconnections.
The sensors have single or dual ultra-thin silicon-nitride membranes, which are characterized by a high thermal resistance to the ambient and a very small time constant. This makes these sensors particularly suited for measurements in gaseous environments and for fast measurements, such as Fast Scanning Calorimetry.
Xensor offers a range of calorimeter chips based on single SiN thin membranes with heated sample areas of different sizes: the XEN-39390 series.
The sample areas range from 8×14 μm2 up to 1×1 mm2. Having aluminum metallization, the temperature range is from 0 K up to 800 K. The smaller the sample area, the faster the upper scan rate, up to 10 MK/s.
Standard housings are TO-5 header, ceramic base plate with flex connector or LCC-20.
The calorimeter chips with gold metallization can go up to beyond the silver point (0 K up to 1300 K): the XEN-39469 to XEN-39473. These chips have dual SiN membranes (sample & reference), with sample areas from 5×5 μm2 up to 150 μm Ø. The smaller the sample area, the faster the upper scan rate, up to 250 MK/s. Standard housings are Mettler-Toledo ceramic, ceramic base plate with flex connector, TO-5 header or LCC-20.
A number of liquid calorimeter chips is available. The older generation chips measure 5×5 mm2 or 10×10 mm2 with robust silicon membranes of 6 μm up to 45 μm thickness. They come in 68-pins PGA ceramic housings, compatible with PGA-ZIF connectors. The new generation liquid calorimeters use the Mettler-Toledo chip with dual SiN membranes. They have polymer covers with 4 access holes to prevent evaporation (see right).
For the Mettler-Toledo Flash DSC 2+ chip calorimeter Xensor offers specials not (yet) officially supported by Mettler-Toledo.
For users aiming to combine calorimetric measurements with optical measurements the XEN-39476 features a transparent area in the 500 μm diameter aluminum sample area.
Opto calorimeter: datasheet XEN-39476